ACM Research Launches Its First Plating Tool to Support Wafer-Level Packaging and Plating Applications in Compound Semiconductor Manufacturing
ACM Research (ACMR) announced the launch of the Ultra ECP GIII plating tool to enhance wafer-level packaging for compound semiconductors, including SiC, GaN, and GaAs. This fully automated tool supports both flat and notched 6-inch wafers and integrates advanced technologies for superior performance, achieving plating uniformity within 3%. ACM has secured two orders from Chinese semiconductor manufacturers, the first delivered in July and another expected by September 30, 2021. The growing demand for advanced semiconductor processing, driven by sectors like electric vehicles and 5G, underpins this innovation.
- Launch of the Ultra ECP GIII plating tool enhances production capabilities for compound semiconductors.
- Achieves plating uniformity within 3%, addressing historical limitations in automation and production volumes.
- Secured two orders from Chinese manufacturers, with the first shipped in July 2021 and another scheduled for September 2021.
- None.
Automated system for flat or notched wafers; multiple orders to ship during third quarter of 2021
FREMONT, Calif., Aug. 25, 2021 (GLOBE NEWSWIRE) -- ACM Research, Inc. (ACM) (NASDAQ: ACMR), a leading supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging (WLP) applications, today announced the launch of ACM’s Ultra ECP GIII plating tool to support WLP for compound semiconductors, with product offerings for silicon carbide (SiC), gallium nitride (GaN) and gallium arsenide (GaAs). The tool is also capable of plating gold (Au) into backside deep hole processes with greater uniformity and better step coverage. The tool features a fully-automated platform to support high volume manufacturing that accommodates both flat and notched 6-inch wafers, and incorporates ACM’s proprietary second anode power and paddle technologies for optimal performance.
“The compound semiconductor market is growing rapidly with strong demand from electric vehicles, 5G communication, and RF and AI applications,” said David Wang, ACM’s Chief Executive Officer and President. “Historically, compound semiconductor manufacturing processes have seen limited levels of automation, and have been subject to restricted production volumes. Further, most plating has been performed by vertical-type plating tools with poor uniformity performance. ACM’s new Ultra ECP GIII plating tool overcomes these challenges to meet the growing volume and advanced performance demands for compound semiconductors.”
ACM’s Ultra ECP GIII tool leverages two key technologies to achieve performance benefits: ACM’s second anode and ACM’s paddle technology. ACM’s second anode technology delivers superior uniformity control by effectively tuning wafer-level plating performance to overcome issues created by electrical field distribution differences. It can be used to optimize big die at wafer edge area patterns and notch area to achieve plating uniformity within
ACM’s paddle technology achieves stronger agitation to enhance mass transfer, resulting in significantly better step coverage in deep holes. Improved step coverage enables a reduction in Au film thickness, achieving cost savings for the customer.
ACM has received two orders for the Ultra ECP GIII from China-based compound semiconductor manufacturers. The first order was delivered in July 2021 to support wafer level packaging with copper–nickel–tin-silver plating modules using second anode technology, and was integrated with a vacuum pre-wet chamber and a post-clean chamber. The second order, scheduled to be delivered later in the quarter ending September 30, 2021, is for a gold (Au) plating system.
Contact ACM to learn more about its Ultra ECP GIII tool and supported applications.
About ACM Research, Inc.
ACM develops, manufactures and sells semiconductor process equipment for single-wafer or batch wet cleaning, electroplating, stress-free polishing and thermal processes that is critical to advanced semiconductor device manufacturing as well as wafer-level packaging. The company is committed to delivering customized, high-performance, cost-effective process solutions that semiconductor manufacturers can use in numerous manufacturing steps to improve productivity and product yield.
The ACM Research logo is a trademark of ACM Research, Inc. For convenience, this trademark appears in this press release without a ™ symbol, but that practice does not mean ACM will not assert, to the fullest extent under applicable law, its rights to the trademark.
| Media Contact: | Company Contacts: |
| Jillian Carapella | U.S. |
| Kiterocket | Robert Metter |
| +1-646-402-2408 | ACM Research, Inc. |
| jcarapella@kiterocket.com | +1-503-367-9753 |
| Europe | |
| Sally-Ann Henry | |
| ACM Research, Inc. | |
| +43-660-7769721 | |
| China | |
| Xi Wang | |
| ACM Research (Shanghai), Inc. | |
| +86-21-50808868 | |
| Korea | |
| YY Kim | |
| ACM Research (Korea), Inc. | |
| +82-10-41415171 | |
| Subsidiary Contacts: | |
| Singapore | |
| Adrian Ong | |
| +65-8813-1107 | |
| Taiwan | |
| David Chang | |
| +886-921-999-884 |
FAQ
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