Welcome to our dedicated page for Onto Innovation SEC filings (Ticker: ONTO), a comprehensive resource for investors and traders seeking official regulatory documents including 10-K annual reports, 10-Q quarterly earnings, 8-K material events, and insider trading forms.
Onto Innovation Inc. (NYSE: ONTO) files a range of documents with the U.S. Securities and Exchange Commission that provide detailed insight into its semiconductor process control business. As a supplier of metrology, defect inspection, lithography and analytics systems to microelectronics device manufacturers, the company uses its SEC filings to describe its single operating segment, technology portfolio, geographic footprint and risk factors.
On this page, you can review Current Reports on Form 8‑K in which Onto Innovation reports material events. Recent 8‑K filings include disclosures about the agreement to acquire, and subsequent completion of the acquisition of, Semilab USA LLC, including the Equity Purchase Agreement, an amendment to that agreement and the mix of cash and common stock used as consideration. Other 8‑Ks furnish quarterly earnings releases, outlining revenue, margins, non‑GAAP measures and financial outlook, along with cautionary statements about forward‑looking information.
Onto Innovation also uses 8‑K and 8‑K/A filings to describe executive and governance‑related matters, such as the adoption of the Onto Innovation Nonqualified Deferred Compensation Plan and the material terms of a separation agreement with a former chief financial officer. These documents detail plan eligibility, deferral elections, vesting and distribution options, as well as severance payments and equity award treatment.
Through Stock Titan, investors can access Onto Innovation’s SEC filings as they are posted to EDGAR and use AI‑powered summaries to interpret complex disclosures. Long‑form documents such as annual reports on Form 10‑K and quarterly reports on Form 10‑Q, when available, can be analyzed for information on process control technologies, geographic operations, risk factors and non‑GAAP adjustments, while Form 4 and other insider transaction reports can be monitored to track equity activity by directors and officers.
Onto Innovation Inc reports that Vanguard Portfolio Management beneficially owned 2,751,547 shares of common stock, representing 5.53% of the class as of 03/31/2026. The filing states dispositive power rests with Vanguard Portfolio Management and affiliated Vanguard entities, per SEC Release No. 34-39538.
Onto Innovation Inc reported that Vanguard Capital Management beneficially owned 2,602,830 shares of Common Stock, representing 5.23% of the class as of 03/31/2026.
The filing states Vanguard has sole dispositive power over 2,602,830 shares and sole voting power for 379,978 shares. The filing was signed on 04/29/2026.
Onto Innovation Inc. agreed to acquire 61,123,436 shares of Rigaku Holdings Corporation, representing 27% of its common stock, for an aggregate purchase price of approximately $710 million under a Share Purchase Agreement with Atom Investments, L.P., an affiliate of The Carlyle Group.
The transaction is expected to close in the second half of 2026, subject to Hart-Scott-Rodino and other regulatory approvals, customary closing conditions and the absence of a Material Adverse Effect. Onto Innovation entered into a $500 million senior secured 364‑day bridge term loan commitment with Goldman Sachs Bank USA to help finance the deal and related costs.
Onto Innovation and Rigaku are deepening an existing collaboration that integrates Onto’s Ai Diffract analysis software with Rigaku’s CD‑SAXS X‑ray platforms, targeting a process control market that external analysts estimate to exceed $1 billion within five years. Onto will hold a minority stake, expects to account for the investment under the fair value option method, gain the right to nominate one Rigaku director and expects the investment to be accretive as of December 31, 2026.
Onto Innovation Inc. reported a strong start to 2026, with a preliminary estimate of first quarter revenue of $292 million, above its previously communicated outlook of $275 to $285 million. The company also issued second quarter 2026 revenue guidance of $320 to $330 million, described as an 8% increase over its earlier outlook.
Onto highlighted the successful qualification of its new Dragonfly® G5 inspection platform for 2.5D advanced AI packaging, with initial shipments expected in June. Management noted a meaningful increase in demand for Dragonfly platforms, which are now expected to grow more than 50% in 2026 compared with 2025, reflecting strong interest in process control solutions for AI-related packaging.
Onto Innovation Inc. reported a strong start to 2026, with a preliminary estimate of first quarter revenue of $292 million, above its previously communicated outlook of $275 to $285 million. The company also issued second quarter 2026 revenue guidance of $320 to $330 million, described as an 8% increase over its earlier outlook.
Onto highlighted the successful qualification of its new Dragonfly® G5 inspection platform for 2.5D advanced AI packaging, with initial shipments expected in June. Management noted a meaningful increase in demand for Dragonfly platforms, which are now expected to grow more than 50% in 2026 compared with 2025, reflecting strong interest in process control solutions for AI-related packaging.
Onto Innovation Inc. is asking stockholders to vote at its 2026 annual meeting on three items: electing seven directors, approving on an advisory basis executive pay, and ratifying Ernst & Young LLP as auditor for 2026.
The Board will have seven members, 86% of whom are independent, with an average age of 64.4 years and average tenure of 6 years. Governance features include an independent Chair, majority voting for directors, annual Board and committee evaluations, stock ownership guidelines, anti-hedging policies, a clawback policy, and no poison pill.
For 2025, Onto reported total revenue of $1 billion, up about 2% from 2024, and operating cash flow of $328 million, up 34%. The compensation program emphasizes pay-for-performance using cash incentives tied to corporate and individual goals and long-term equity awards, including performance stock units based on relative total shareholder return.
Onto Innovation Inc: An amendment to Schedule 13G/A from The Vanguard Group reports 0 shares beneficially owned and 0% of the common stock. The filing explains an internal realignment effective January 12, 2026, after which certain Vanguard subsidiaries now report ownership separately.
The filing is signed by Ashley Grim, Head of Global Fund Administration, on 03/27/2026.
ROBERTS BRIAN K reported acquisition or exercise transactions in this Form 4 filing.
Onto Innovation Inc. Chief Financial Officer Brian K. Roberts reported equity award grants on March 2, 2026. He received 3,096 shares of common stock and new awards of performance stock units, all at a stated price of $0.00 per share as compensation.
The common stock grant and RSUs vest in three equal annual installments over three years from the award date. The performance stock units represent a target number of shares, with actual vesting ranging from 0% to 200% based on performance criteria over the award period.
Onto Innovation Inc. executive vice president Ido Dolev reported routine equity compensation and related tax withholding. On March 2, he received a grant of 3,440 shares of common stock and two performance stock unit awards of 1,720 units each, all at a stated price of $0.00 per unit. The performance stock units represent target awards that may ultimately vest between 0% and 200% based on performance criteria. On March 3, 819 shares of common stock valued at $207.50 per share were withheld to cover tax obligations tied to previously granted restricted or performance stock units, leaving him with 26,536 common shares held directly.
Onto Innovation Inc. Chief Operating Officer Ramil Yaldaei received several equity awards and had shares withheld to cover taxes. On March 2, he was granted 7,683 shares of common stock and two awards of 1,548 performance stock units each, all at a stated price of $0.00 per unit as part of compensation. On March 3, 615 shares of common stock at $207.50 per share were withheld to satisfy tax obligations tied to prior RSU or PSU vesting, leaving him with 18,436 common shares held directly. The RSUs vest in three equal annual installments, while the performance stock units can ultimately vest between 0% and 200% of the target amount based on specified performance criteria.