Welcome to our dedicated page for Axcelis Tech Ord SEC filings (Ticker: ACLS), a comprehensive resource for investors and traders seeking official regulatory documents including 10-K annual reports, 10-Q quarterly earnings, 8-K material events, and insider trading forms.
The Axcelis Technologies Inc (ACLS) SEC filings page on Stock Titan provides access to the company’s U.S. regulatory disclosures, with AI-powered tools to help interpret complex documents. As a Nasdaq-listed semiconductor equipment supplier, Axcelis files periodic and current reports that describe its financial performance, business risks and significant corporate events.
Key filings for Axcelis include annual reports on Form 10-K and quarterly reports on Form 10-Q, which detail revenue from product and service lines, gross margins, operating income, research and development spending and other financial metrics. These filings also describe Axcelis’ core business in ion implantation systems and aftermarket lifecycle products and services for semiconductor manufacturing.
Current reports on Form 8-K capture material events. Recent examples include 8-K filings reporting quarterly financial results and an 8-K describing the Agreement and Plan of Merger among Axcelis, a wholly owned merger subsidiary and Veeco Instruments Inc. That filing outlines the exchange ratio for Veeco shares, the planned structure in which Veeco will become a wholly owned subsidiary of Axcelis, and the conditions and approvals required for closing.
On this page, users can also review exhibits attached to 8-K filings, such as investor presentations and transaction-related communications referenced in Axcelis’ merger disclosures. In addition, insider transaction reports on Form 4 and proxy materials are available through the SEC system and can be analyzed alongside these filings.
Stock Titan’s AI features summarize lengthy 10-K, 10-Q and 8-K documents into plain-language highlights, identify key changes from prior periods and surface notable items such as merger terms or changes in risk factors. Real-time updates from EDGAR ensure new Axcelis filings appear promptly, while AI-generated overviews help readers understand the implications without reading every page.
Axcelis Technologies Inc reported that Vanguard Capital Management beneficially owns 1,617,321 shares of common stock, representing 5.26% of the class. The filing shows Vanguard has sole dispositive power over 1,617,321 shares and sole voting power for 234,551 shares. The disclosure is signed by the Head of Global Fund Administration and filed on 04/29/2026.
Axcelis provides an internal update on the proposed merger with Veeco. The company restates that a Form S-4 registration statement was filed and declared effective on December 31, 2025, and that a definitive joint proxy statement/prospectus was filed and mailed on or about December 31, 2025. The communication to employees dated April 29, 2026 summarizes preparatory activities and reiterates the risks and forward-looking nature of statements tied to regulatory approvals, integration, and expected synergies.
Axcelis provides an internal update on the proposed merger with Veeco. The company restates that a Form S-4 registration statement was filed and declared effective on December 31, 2025, and that a definitive joint proxy statement/prospectus was filed and mailed on or about December 31, 2025. The communication to employees dated April 29, 2026 summarizes preparatory activities and reiterates the risks and forward-looking nature of statements tied to regulatory approvals, integration, and expected synergies.
Axcelis Technologies Inc reported that Vanguard Portfolio Management beneficially owns 2,501,359 shares of common stock, representing 8.14% of the class as of 03/31/2026. The filing states Vanguard has sole voting power over 13,066 shares and sole dispositive power over 2,501,359 shares, and describes ownership as held across Vanguard affiliates and client accounts.
Axcelis Technologies executive Christopher Tatnall had 907 shares of common stock withheld for taxes in connection with restricted stock units vesting. The tax withholding was valued at $131.02 per share, based on the closing price on the withholding date.
After this vesting and tax withholding, Tatnall directly holds 23,044 shares, including 16,463 shares issuable upon vesting of restricted stock units that remain subject to forfeiture under the company’s 2012 Equity Incentive Plan.
Axcelis Technologies president and CEO Russell Low executed an open-market sale of 1,244 shares of common stock at $94.06 per share on April 1, 2026. The transaction was made under a pre-arranged Rule 10b5-1 trading plan adopted on December 11, 2025.
Following this sale, Low directly holds 132,282 shares of Axcelis common stock. Of these, 83,480 shares are issuable upon vesting of restricted stock units granted under the 2012 Equity Incentive Plan and remain subject to forfeiture.
ACLS affiliate filed a Section 144 notice reporting the proposed sale of 1,244 shares of Common Stock. The filing references Restricted Stock Units granted 02/28/2023 and a 10b5-1 sale executed 03/24/2026 that lists $111,960.00. The filing date shown is 04/01/2026.
Axcelis Technologies is asking stockholders to vote at its May 5, 2026 annual meeting on three main items: electing eight directors, ratifying Ernst & Young LLP as independent auditor for 2026, and approving 2025 executive compensation in an advisory Say-on-Pay vote.
Only holders of the 30,729,970 shares outstanding as of March 12, 2026 may vote, with one vote per share. The proxy details strong prior support, including 92.67% average director support and 87.1% backing for 2024 pay in 2025. It highlights 2025 results of $839 million in revenue and $3.80 diluted EPS, an 18% revenue decline but improved margins, 14% growth in Customer Solutions & Innovation revenue, and a focus on power device tools, which were 54% of 2025 system shipment value.
Executive pay remains heavily performance-based: the 2025 team incentive funded at 103.1% of target and performance-based RSUs earned at 112.5% of target, leading to realized CEO pay at about 104% of 2025 target and other named executives averaging about 102%.
AXCELIS TECHNOLOGIES INC president and CEO Russell Low reported an open-market sale of 1,244 shares of common stock at $90.00 per share on March 24, 2026. After the sale, he directly holds 133,526 shares, including 83,480 shares issuable upon vesting of restricted stock units that remain subject to forfeiture.
The transaction was executed under a pre-arranged Rule 10b5-1 trading plan adopted on December 11, 2025, indicating it was scheduled in advance rather than timed discretionarily. Overall, the sale represents a small portion of his total reported holdings.
Axcelis Technologies Inc ownership disclosure: The Vanguard Group filed an Amendment No. 9 to Schedule 13G/A reporting 0 shares beneficially owned, representing 0% of the class. The filing explains an internal realignment on January 12, 2026 and reliance on SEC Release No. 34-39538 for disaggregated reporting.
The filing states Vanguard subsidiaries and business divisions will report holdings separately and that Vanguard no longer is deemed to beneficially own securities held by those units.