Advanced Energy’s New Impedance Matching Network Provides Ultra-Fast, RF-Synchronized Tuning to Multilevel Pulse States
Advanced Energy has introduced the NavX™ impedance matching network with industry-leading algorithms and direct generator communication, offering precise and repeatable plasma control critical in advanced semiconductor fabrication.
The NavX platform, paired with the eVerest™ generator, forms an advanced RF delivery system, enabling ultra-fast tuning and RF synchronization during multilevel pulse states. Features include selectable tuning algorithms, a +/- 10% frequency span for faster tuning, and IMD immunity for multi-frequency applications. This system is also compatible with PowerInsight IoT for high-resolution data access.
- Introduction of the advanced NavX™ impedance matching network for precise plasma control.
- Integration with eVerest™ generator to form an advanced RF delivery system.
- Selectable tuning algorithms and +/- 10% frequency span for faster tuning.
- Compatibility with PowerInsight IoT platform for high-resolution data access.
- None.
Advanced Energy’s new NavX™ impedance matching network offers promising advancements for the semiconductor industry, particularly in the precise control of plasma characteristics, which is critical for modern semiconductor fabrication processes. The platform’s accelerated response and minimized reflected power address key challenges in achieving precise control during rapid pulsing and complex 3D structure fabrication.
From a technical perspective, the integration of direct match-generator communication and RF-synchronized impedance matching is a significant leap forward. This means that semiconductor manufacturers can achieve more consistent and reliable performance, reducing the likelihood of errors and enhancing efficiency. The proprietary algorithms and selectable tuning capabilities further enable the system to adapt dynamically to varying pulse states, which is essential for the evolving needs of semiconductor technologies, especially as they move towards smaller, faster and more efficient chips.
For retail investors, understanding that this technology could potentially lower operational costs and improve yields for semiconductor manufacturers provides a strong indication of its market potential and long-term adoption.
The unveiling of the NavX™ impedance matching network represents a strategic move by Advanced Energy Industries to solidify its position in the semiconductor fabrication market. The emphasis on precise and repeatable plasma control speaks directly to the needs of an industry striving for greater efficiency and smaller chip architectures. This could lead to increased demand for AEIS's products as manufacturers upgrade their equipment to remain competitive.
Notably, the integration with the eVerest™ generator and compatibility with the PowerInsight IoT platform suggest a holistic approach to process optimization and data analytics. This integration can translate into higher productivity and smarter manufacturing processes, potentially leading to cost savings and improved product quality.
Investors should be keen on tracking how this product adoption impacts AEIS’s market share in the semiconductor equipment sector, as well as any partnerships or endorsements from leading semiconductor manufacturers.
NavX™ match platform’s accelerated response minimizes reflected power for precise control of plasma characteristics in complex semiconductor processes
NavX™ match platform’s accelerated response minimizes reflected power for precise control of plasma characteristics in complex semiconductor processes (Graphic: Business Wire)
Next-generation semiconductor etch processes require unprecedented levels of plasma control during rapid pulsing, frequent transitions, and longer recipes that are needed to fabricate smaller, faster and more efficient chips with more complex 3D structures.
Advanced Energy’s NavX matching network is specifically designed with direct match-generator communication and ultra-fast tuning leveraging AE hardware and proprietary algorithms. This enables RF-synchronized impedance matching during multilevel pulse states for precise control of plasma characteristics. Paired with the eVerest™ generator, NavX completes AE’s latest RF delivery system (RFDS), enabling unparalleled control of plasma characteristics.
“Building on over 20 years of experience in developing advanced RF delivery systems for plasma processes, the NavX matching network redefines tuning speed, sophistication and RF synchronization for exacting plasma control across the most complex pulsing profiles,” said Juergen Braun, Advanced Energy’s senior vice president of plasma power products. “The platform’s groundbreaking selectable tuning algorithm, which enables impedance matching to multiple RF pulse states, instantly reduces reflected power in processes with shorter RF-on times.”
NavX directly synchronizes with the eVerest RF generator and incorporates proprietary Advanced Selectable Tuning and Velocity Tuning algorithms that optimize response speeds for pulse sequences. The system’s +/-
The NavX matching network is fully compatible with the PowerInsight by Advanced Energy® IoT platform, which provides rapid access to high-resolution, actionable data that supports process optimization.
Read more about NavX here.
About Advanced Energy
Advanced Energy Industries, Inc. (Nasdaq: AEIS) is a global leader in the design and manufacture of highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. Advanced Energy’s power solutions enable customer innovation in complex applications for a wide range of industries including semiconductor equipment, industrial production, medical and life sciences, data center computing, networking and telecommunications. With engineering know-how and responsive service and support for customers around the globe, the company builds collaborative partnerships to meet technology advances, propels growth of its customers and innovates the future of power. Advanced Energy has devoted four decades to perfecting power. It is headquartered in
For more information, visit www.advancedenergy.com.
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View source version on businesswire.com: https://www.businesswire.com/news/home/20240625613976/en/
For press inquiries, contact:
Simon Flatt
Grand Bridges for Advanced Energy Industries, Inc.
aei@grandbridges.com
+1 415 800 4529
Source: Advanced Energy Industries, Inc.
FAQ
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