Axcelis Announces Shipment of Purion EXE Power Series Implanter to Leading SiC Power Device Chipmaker in Japan

Rhea-AI Summary

Axcelis Technologies announces shipment of Purion EXE SiC Power Series™ 200mm high energy implanter to leading SiC power device chipmaker in Japan.

Positive

• The power device market is one of the fastest growing segments in IC manufacturing.
• The Purion Power Series family is uniquely suited for handling multiple wafer sizes and various substrate types.
• Axcelis Technologies aims to expand the Purion platform footprint in Japan.

Negative

• None.

Axcelis' Leadership in the Power Device Segment Continues to Grow

BEVERLY, Mass., Oct. 18, 2023 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced the shipment of the Company's Purion EXE SiC Power Series™ 200mm high energy implanter to a leading SiC power device chipmaker located in Japan. The system will be used in high volume production of SiC power devices for use in automotive applications.

Executive Vice President of Marketing and Applications, Greg Redinbo, commented, "The power device market is one of the fastest growing segments in IC manufacturing, due in part to the robust growth in the electric vehicles market. The power device market is at a critical inflection point as chipmakers transition from 150mm to 200mm SiC wafers. The Purion Power Series family is uniquely suited to excel at these applications due to its innovative platform that offers the flexibility to handle multiple wafer sizes, various substrate types and operate at various implant temperatures. We look forward to continuing to expand the Purion platform footprint in Japan and supporting our customers' goals to increase their manufacturing capacity."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 45 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE AXCELIS TECHNOLOGIES, INC

FAQ

What product did Axcelis Technologies announce the shipment of?

Axcelis Technologies announced the shipment of the Purion EXE SiC Power Series™ 200mm high energy implanter.

Who is the recipient of the shipment?

The shipment was made to a leading SiC power device chipmaker in Japan.

What market is experiencing robust growth?

The power device market is experiencing robust growth.

What are the advantages of the Purion Power Series family?

The Purion Power Series family is uniquely suited for handling multiple wafer sizes and various substrate types.

What is Axcelis Technologies' goal for the Purion platform in Japan?

Axcelis Technologies aims to expand the Purion platform footprint in Japan.